Shanghai Huaji Electronic Technology Co., Ltd
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    Room 1106, Zone D, Youkou Industrial Park, No. 377 Chengpu Road, Fengxian District, Shanghai
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1700 ° C Two Channel Mixed Gas High Vacuum CVD System GSL-1700X-HVC
1700 ° C Two Channel Mixed Gas High Vacuum CVD System GSL-1700X-HVC
Product details

GSL-1700X-HVC is a CE certified two channel high vacuum CVD system, which consists of a two-way proton mixing system and a high vacuum unit. Its maximum operating temperature can reach 1600 ℃, and the ultimate vacuum degree can reach to 10 ^ -5 torr. The gas mixing system can accurately mix two gases and then introduce them into the tube furnace.

Technical Parameter
GSL-1700X series tubular furnace housing

Adopting a double-layer shell structure with air cooling, the surface temperature of the shell is kept below 55 ° C

The surface of the inner furnace is coated with a high-temperature alumina coating imported from the United States, which can improve the heating efficiency of the equipment and also extend the service life of the instrument

The insulation material adopts high-purity alumina fiber, which is environmentally friendly and energy-saving, reducing heat loss

The vacuum pump and gas mixing system are located on a mobile frame for easy movement

High vacuum flanges, valves, and high vacuum units have been installed on the instrument

furnace tube

Material: High purity alumina ceramic tube

A high-purity alumina ceramic tube has been installed on the furnace

● (Standard size) (60mm) O.D. x I.D. (54mm) x 1000mm Length

● (Optional size) (80mm) O.D. x I.D. (74mm) x 1000mm Length

power 6KW
working voltage AC 208-240V single-phase, 50/60Hz
heating element 8 pieces of 1800 ° C grade MoSi2 heating elements
operation temperature

● Maximum operating temperature.: 1650°C

● Continuous operating temperature.: 1600°C

heating rate ≤5°C/min
Heating zone length

Heating zone length: 457 mm (18")

Length of constant temperature zone: 150 mm (6")(+/-1°C)Note: Due to the influence of measurement methods and external environment, the measurement results may have deviations. This parameter is for reference only and should not be used as a technical indicator of the equipment. You need accurate constant temperature zone data to purchase the product. Please contact our sales personnel

temperature control

● Adopt PID automatic control and can set 30 temperature rise and fall programs

Temperature control accuracy: ±1°C

Temperature control instrument operation video

● Thermocouple: Type B, already installed inside the furnace

Vacuum flange

A pair of stainless steel vacuum sealed flanges have been installed

There is a mechanical pressure gauge on the flange

● Two precision needle valves

● One KF-25 connector and KF-25 to KF-40 exhaust interface

● One 1/4 "card sleeve connector

External dimensions 550 x 380 x 520mm
High vacuum unit power 100~110W
working voltage AC 208-240V single-phase, 50/60Hz
External dimensions 600(L) x 600(W) x 700(H), mm
housing

Shell size: 600 (L) x 600 (W) x 700 (H), mm

Maximum load capacity: 600 Lbs on top

Molecular pump control panel: LCD digital display

Equipped with a Pfeiffer vacuum pump made in Germany:

control panel

One click operation: After pressing the "start" button, the diaphragm pump and turbo molecular pump will start (the diaphragm pump will start first, and the molecular pump will automatically start after the vacuum degree reaches 10-2mbar)

● System controlled rotation rate: Based on the vacuum level inside the chamber, the system automatically controls the rotation rate of the rotary vane pump

1 1 1 1 1
pumping speed

● N2 33 L/s

● He 39 L/s (2340L/minute)

● H2 32 L/s

scope of work 1000 mbar to <1E-7 mbar
the limit <1E-8 mbar (without any leaking )
MFC Mass Flow Controller housing

Made of 316 stainless steel

● Size of the mixing box: Φ80X120mm

● Dimensions: 600(L) x 600(W) x 700(H), mm

MFC control panel (Click to enlarge), customizable according to customer requirements

1
power 18W
working voltage AC 208-240V, single-phase, 50/60Hz
Warranty period One year warranty period, excluding consumables such as furnace tubes, sealing rings, and other consumables
Certificate ● CE certification
All electrical components (>24V) are certified by UL/MET/CSA
If the customer incurs certification fees, our company guarantees that a single device will pass the German TUV certification or CAS certification
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Successful operation!

Successful operation!

Successful operation!