10.5 litersLOW-COST-PLASMA-LABORANLAGE ATTOIt is a manual type equipped with PC and PCCE control systems, mainly used in the following fields:
Small batch production
Analysis (REM, TEM)
medical technology
sterilization
Research and Development Department
Archaeology
Textile Technology
Plastic technology
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Plasma equipment Atto,Equipped with manual control systemPlasma cleaner, plasma ashing device, plasma etching machine, plasma activation system, used for small batch process research and development, cleaning, activation, etching | Plasma equipment Atto,Equipped with an external PC control systemPlasma cleaner, plasma ashing device, plasma etching machine, plasma activation system, used for small batch process research and development, cleaning, activation, etching plasma system | Plasma equipment Atto,Equipped with built-in PC control systemPlasma cleaner, plasma ashing device, plasma etching machine, plasma activation system, used for small batch process research and development, cleaning, activation, etching plasma system |
series |
Attomanual control |
AttoexternalPCcontrol |
AttointegratePC control |
Control system |
Manual type, measuring process time through analog timer |
PC-Control system(Microsoft Windows XP) |
PC-Control system(Microsoft Windows CE) |
volume |
10.5L |
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vacuum chamber |
Glass material∅211 mm, Long300 mm |
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Sample holder |
1A sample holder |
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Gas source |
2 A gas channel controlled by a needle valve |
2 A byMFCsControlled gas channel |
2 A byMFCsControlled gas channel |
High frequency current generator |
40 kHz/200 Wperhaps13.56 MHz/50 W,300W |
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Vacuum pump |
8m3/h |
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External dimensions |
wide525 mm, high275 mm, deep450 mm |
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supply voltage |
AC220V |