Shanghai Erdi Instrument Technology Co., Ltd
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    189-1604-7697
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    Room 1003, Building C, Minggu Science and Technology Park, Lane 7001, Zhongchun Road, Minhang District, Shanghai
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Diener ATTO plasma cleaning machine
Diener ATTO plasma cleaning machine
Product details

10.5 litersLOW-COST-PLASMA-LABORANLAGE ATTOIt is a manual type equipped with PC and PCCE control systems, mainly used in the following fields:

  • Small batch production

  • Analysis (REM, TEM)

  • medical technology

  • sterilization

  • Research and Development Department

  • Archaeology

  • Textile Technology

  • Plastic technology

Plasma equipment Atto,Equipped with manual control systemPlasma cleaner, plasma ashing device, plasma etching machine, plasma activation system, used for small batch process research and development, cleaning, activation, etching Plasma equipment Atto,Equipped with an external PC control systemPlasma cleaner, plasma ashing device, plasma etching machine, plasma activation system, used for small batch process research and development, cleaning, activation, etching plasma system Plasma equipment Atto,Equipped with built-in PC control systemPlasma cleaner, plasma ashing device, plasma etching machine, plasma activation system, used for small batch process research and development, cleaning, activation, etching plasma system


series

Attomanual control

AttoexternalPCcontrol

AttointegratePC control

Control system

Manual type, measuring process time through analog timer

PC-Control system(Microsoft Windows XP)

PC-Control system(Microsoft Windows CE)

volume

10.5L

vacuum chamber

Glass material211 mm, Long300 mm

Sample holder

1A sample holder

Gas source

2 A gas channel controlled by a needle valve

2 A byMFCsControlled gas channel

2 A byMFCsControlled gas channel

High frequency current generator

40 kHz/200 Wperhaps13.56 MHz/50 W,300W

Vacuum pump

8m3/h

External dimensions

wide525 mm, high275 mm, deep450 mm

supply voltage

AC220V



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