Instrument Introduction:
By using an automatic sample stage with high positional accuracy and high sensitivity performance, it is possible to quickly scan and inspect small foreign objects, as well as accurately measure specific parts of composite materials such as electronic substrates.
characteristic:
1. Quick scan
With a high counting rate detector with a maximum of 1.5 million CPS, high-sensitivity measurements are achieved, and a fast electric sample stage with a maximum scanning range of 250 mm × 200 mm is used to achieve rapid scanning measurements. For the case of a range of 100 mm × 100 mm, the lead in the terminal part can be detected and its position can be determined within 2-3 minutes.
2. Continuous multi-point measurement
Up to 500 measurement positions can be specified for continuous multi-point measurement. Due to the use of automatic measurement methods, it can also achieve high efficiency in measuring a large number of samples.
3. High precision coincidence
Through the Telecentric Lens system and high-speed? The high-precision XY platform allows for easy observation of target elements in the central part of small components by overlapping element scanning images with optical imaging. Observation above a maximum of 250 mm x 200 mm, and precise positioning with a minimum error of 100 μ m in wide area position can be achieved.
4. Measurement of small parts
The widely recognized instrument for measuring coating thickness in the FT series is the EA6000VX. Not to mention measuring the thickness of extremely thin gold plating and other films, even when analyzing harmful substances such as Pb in coating clocks through film pressure measurement, film thickness measurement can also be performed simultaneously. For example, the concentration of harmful substances in lead-free solder coatings, Sn coatings on lead frames, and electroless Ni coatings can also be measured.
5. Measurement of restricted substances in the environment
High sensitivity measurement of RoHS and other restricted substances, capable of detecting trace amounts of environmental pollutants contained in resins, metals, etc. in a short period of time. Measurement of composite samples can also be focused on specific areas
6. Light element measurement
By installing the helium filling option, light elements starting with sodium can be analyzed. A helium system that can operate independently during measurement. Maximize the reduction of usage costs.
7. Perspective scanning function
Laptops, mobile phones, and other products whose internal structure cannot be seen through the outer packaging can obtain scanned images of not only Pb on the substrate, but also various other elements without disassembly. By comparing the elemental scanning images obtained after X-ray irradiation, various information about the internal component structure of the product can be obtained.
8. Foreign object detection EA6000VX
The EA6000VX can detect small metal foreign objects of several tens of micrometers within a wide range (up to 250 mm × 200 mm) and determine their specific locations within a few minutes through its fast scanning function. It can also detect small and trace metal foreign objects inside organic substances such as resins.
9. Absolute safety and reassuring operability
Once the sample is set to start on the automatic approach and collision prevention function console, the maximum height of the sample will be automatically measured and moved to the most suitable measurement height. Even complex shaped samples can be easily measured by operators. In addition, even if the measurement height is adjusted through the operation guide, the sample will not be damaged due to the installation of collision prevention sensors.
Model name: EA6000VX
X-ray source: 50kV, 1mA, air-cooled
Detector: Semiconductor detector (no need for liquid nitrogen)
One time filter: 6 automatic switching modes
Collimator: 0.2, 0.5, 1.2, 3mm automatic switching
Sample Room Size: W580mm × D450mm × H150mm
Can comprehensively measure 250mm × 200mm samples