Explorer is a multifunctional high vacuum research and pilot production platform, which can be configured for electron beam (e-beam) evaporation, resistance evaporation, or magnetron sputtering. Ionic assisted deposition function can be optionally selected in all three configurations. Explorer can be used in semi manual mode or upgraded to fully automatic mode, with one click automation operation, which can reduce system downtime.

Purpose:
Characterization and Design of Optical Coating for Semiconductor Device Development, CIGS and Advanced Materials Research

Analysis of Quality Assurance Malfunctions in High end Electron Microscope Sample Preparation

Advantages:

Explorer, with its flexible chamber size, can accommodate substrates up to 8 inches in size. The sputtering configuration is suitable for DC, pulsed DC, and RF sputtering, and has confocal sputtering capability. You can choose proprietary PEM technology, which is a closed-loop control system for high-speed reactive sputtering in metal oxide and nitride transition modes.
We offer a variety of vacuum pumping configurations - diffusion pumps, cold pumps, and turbo pumps - which can be installed at the rear or bottom of the equipment to meet process requirements and provide fast pumping capabilities to meet high production capacity needs.