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FMSZ-P series - piezoelectric motor lifting platform
Ultra high precision vertical lifting platform
Product details
Selection Guide for Electric Displacement Platform Naming convention for Feinixs series products Basic concepts of displacement control
FMSZ-P series - piezoelectric motor lifting platform
Detailed specification parameters
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Ultra high precision vertical lifting platform |
Detailed specification parameters
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| Product classification | Piezoelectric motor lifting platform | Piezoelectric motor lifting platform |
| Product model | FMSZ115P-50 | FMSZ85P-20 |
| External dimensions | 115x115x110 | 85x85x85 |
| Table size (mm) | 115x115 | 85x85 |
| Continuous thrust (N) | 40 | 20 |
| Peak thrust (N) | 40 | 20 |
| Travel distance (mm) | 50 | 20 |
| Maximum speed (mm/s) | 5 | 5 |
| Load (Kg) | 2 | 1 |
| Resolution (um) | 0.1 | 0.1 |
| Minimum displacement (um) | 0.2 | 0.2 |
| Unidirectional repeat positioning accuracy (um) | ±0.5 | ±0.5 |
| Bidirectional repeat positioning accuracy (um) | ±1 | ±1 |
| Positioning accuracy (um) | ±2 | ±2 |
| Straightness (um) | 5 | 5 |
| Parallelism (um) | 5 | 5 |
| Deviation (") | 10 | 10 |
| Pitch (") | 10 | 10 |
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