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FMSZ-S series - servo motor lifting platform
Grating ruler closed-loop, large load capacity, high precision
Product details
Selection Guide for Electric Displacement Platform Naming convention for Feinixs series products Basic concepts of displacement control
FMSZ-S series - servo motor lifting platform
Detailed specification parameters
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(1) Grating ruler closed-loop, large load capacity, high precision |
Detailed specification parameters
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| Product classification | Servo lift table | Servo lift table | Servo lift table |
| Product model | FMSZ170S-100 | FMSZ170S-200 | FMSZ170S-300 |
| External dimensions | 529x170x85.5 | 629x170x85.5 | 729x170x85.5 |
| Table size (mm) | 170x170 | 170x170 | 170x170 |
| electric machinery | servo motor | servo motor | servo motor |
| Travel distance (mm) | 100 | 200 | 300 |
| Maximum speed (mm/s) | 100 | 100 | 100 |
| Load (Kg) | 20 | 20 | 20 |
| Resolution (um) | 0.5 | 0.5 | 0.5 |
| Minimum displacement (um) | 1 | 1 | 1 |
| Unidirectional repeat positioning accuracy (um) | ±1 | ±1.5 | ±2 |
| Bidirectional repeat positioning accuracy (um) | ±2 | ±3 | ±4 |
| Positioning accuracy (um) | ±10 | ±12 | ±15 |
| Straightness (um) | 15 | 15 | 15 |
| Parallelism (um) | 15 | 15 | 15 |
| Deviation (") | 30 | 30 | 30 |
| Pitch (") | 30 | 30 | 30 |

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