Name: Gas Cabinet Specification: Single process gas cylinder, fully automatic

model: WF-GC100

Special gas cabinet dimensions: W550 wide x D500 deep x H1800 high

■ External blowing: PN2, 1/4 "MVCR interface

Vacuum pumping: GN2, 1/4 "MVCR interface

Pneumatic diaphragm valve: CDA driven, 1/4 "card sleeve interface

■ VENT exhaust pipe: 1/2MCCR interface

Process gas outlet: 2, 1/4 "MVCR interface

■ Panel size: 1/4 "panel

Standard equipment: Explosion proof and anti-corrosion cabinet, explosion-proof self-locking door, explosion-proof glass observation window, leakage alarm, remote cut-off, undervoltage alarm, main material SS316L

Cabinet ventilation rate: 4 "exhaust port, 1200 times/hour

■ Control cabinet size: W550 wide x D230 deep x H320 high

Control cabinet power supply: 220VAC, 50HZ, 200W, leakage protection

■ Operating interface: 7 "color touch screen

■ Optional: Process gas cylinder weight monitor, process gas overpressure alarm, panel heating and temperature control device, alarm signal SMS and phone notification

Scope of application: Applied in MOCVD PECVD、 The etching machine and other supporting equipment are suitable for industries such as university laboratories, material analysis laboratories, chip semiconductors, photovoltaic solar cells, biopharmaceutical engineering, and microelectronic new materials.