Characteristics of high and low temperature probe stations

●productFunction:High and low temperature probe stationbyMeasuring electrical characteristics of small-sized samples, providing a high-precision and controllable measurement environment;

●Scope of use:Assist in precise measurement and analysis of the performance of wafer devices.

●Application areas:Provide technical solutions for testing the IV/CV characteristics of materials/devices, testing the light intensity/wavelength of LD/LED/PD, analyzing the failure of RF characteristic devices, and testing the internal circuits/electrodes/PAD of chips;

●Customized services:Customized sample stage and measurement method;

●Automatic temperature control:PID self-tuning continuous multi-point temperature control.

Technical parameters of vacuum probe station:

●External dimensions:650mm in length, 650mm in width, and 1300mm in height;

●Temperature range:-196-400 ℃ (ambient temperature);

●Cooling and heating methods:Liquid nitrogen refrigeration, resistance heating;

●Sample table size:≤φ100mm；

●Effective height:40mm；

●Vacuum degree:Mechanical pump ≤ 10Pa, molecular pump ≤ 5.0 e-3Pa;

●Gas path:1-2 routes;

●Temperature sensor:PT100；

●Temperature control method:PID linear adjustment;

●Temperature control accuracy:±0.1℃；

●Maximum heating rate:80 ℃/min (RT to 100 ℃);

●Maximum cooling rate:50 ℃/min (RT to -100 ℃);

●XYZ axis travel:50mm*50mm*10mm；

●Probe structure:External probe arm, vacuum bellows structure;

●Mobile accuracy:0.01mm；

●Cable:Coaxial/RF cable;

●Probe type:Tungsten probe (type optional);

●Type of connector:BNC/crocodile clip/terminal block;