Intelligent Mass Flow Meter Small Volume Flow Controller Thermal Gas Mass Flow Meter
Purpose and Characteristics
Mass Flow Controller (MFC) is used for precise measurement and control of gas mass flow. They play an important role in scientific research and production in various fields such as semiconductor and integrated circuit industry, special materials discipline, chemical industry, industrial, pharmaceutical, * * * and vacuum lamp. Its typical application scenarios include electronic process equipment such as diffusion, epitaxy CVD、 Oxidation, plasma etching, sputtering, ion implantation; And coating equipment, fiber melting, micro reaction device, mixed gas distribution system, capillary measurement, gas chromatograph and other analytical instruments.
Main technical indicators
Range (20, 30, 50, 100, 200, 300, 500) SCCM (0~1, 2, 3, 5, 10) SLM
Accuracy+1.5% F.S
Linear+0.5~1.5% F.S
Repetitive accuracy+0.2% F.S
Response time 10 seconds Gas characteristics: (1-4) seconds
Working pressure difference of 0.1~0.5MPa
Withstand voltage 3Mpa, 6Mpa, 10Mpa
Working environment temperature: 0~70 ℃
Digital RS485 MODBUS protocol
Analog DC 0~5V, 4~20mA optional
Electrical characteristics: SLM
Power supply DC+15V/24V optional, flow meter ＜ 50mA, controller ＜ 200mA
Electrical connection DB15
Leakage rate 1 × 10 SCCSHe
Base material 316L stainless steel
Sealing materials include fluororubber, nitrile rubber, chloroprene rubber
Air circuit connectors with sizes of Φ 3, Φ 6, Φ 10, 1/8 ", 1/4", and 3/8 "
Attention: Mass flow meters and mass flow controllers are usually calibrated with nitrogen (N ₂) at the factory
The unit of mass flow rate is specified as SCCM (standard milliliters per minute); SLM (standard liters per minute)
Intelligent Mass Flow Meter Small Volume Flow Controller Thermal Gas Mass Flow Meter