MicroXAM-800 is a non-contact optical profilometer used for measuring 3D surface morphology and roughness. MicroXAM-800 is an optical profiler based on a white light interferometer, which uses phase scanning interferometry (PSI) to measure nanoscale features and vertical scanning interferometry (VSI) to measure submicron to millimeter level features. MicroXAM further extends these technologies by using SMART Acquire to simplify program settings for novice users, and utilizing z-stitching interferometry to enable high-speed measurement of large step heights. The program settings of MicroXAM-800 are simple and flexible, allowing for single scan or multi-point automatic measurement.

The advantage of MicroXAM measurement technology is that the vertical resolution of the measurement is independent of the numerical aperture of the objective lens, allowing for high-resolution measurements over a wide field of view. The measurement area can be further increased by concatenating multiple fields of view into the same measurement result. MicroXAM's user interface is innovative and simple, suitable for various work environments from research and development to production.

2、 Function

major function

Step height: 3D step height from nanometer to millimeter level

Texture: 3D roughness and waviness

Appearance: 3D warping and shape

Edge Roll off: 3D Edge Contour Measurement

Defect re inspection: 3D defect surface morphology

FEATURES

Phase and vertical scanning interferometry for nanoscale to millimeter level features;

SMART Acquire simplifies the acquisition mode and uses the best known program settings for measurement range input;

Z-stitching interferometry technology acquisition mode, which can be used for single scanning and compiling multiple surfaces with large longitudinal (z) distances;

XY stitching can concatenate continuous sample regions larger than a single field of view into a single scan;

The use of scripts simplifies the creation of complex measurements and workflow analysis, achieving flexibility in measurement location, leveling, filtering, and parameter calculation;

Transfer algorithms from other probes and optical profilometers using known best techniques.

Technical capabilities

Z-resolution: 0.2nm (PSI)

RMS repeatability: 0.1nm

Step repeatability: 0.1nm or 1% step height

3、 Application

Semiconductors and compound semiconductors

LED： Light Emitting Diode

Power Equipment

MEMS： MEMs

Data Storage

medical equipment

Precision surface

4、 Other

Some users

University Paris Sud

Lanzhou Institute of Chemical Physics

Koszalin University of Technology

Tianjin University

University of Alabama

Shanghai Jiaotong University

Beihang University

Nanjing University of Aeronautics and Astronautics

jiangsu university

Tsinghua University

Fuzhou University