For engineers, identifying media/The task of nanoscale defects on planar substrates is a very time-consuming process,Park NX-HDMAtomic force microscopy systems can automatically identify defects and improve defect detection efficiency by being combined with various optical instruments. More and more industries require ultraflat media and substrates to meet the constantly shrinking equipment demands,Park NX-HDMAtomic force microscope system has the lowest performance in the industry0.5Combining with its true non-contact mode to achieve sub angstrom level surface roughness testing.

Basic technical parameters

major function

1)Quick automatic defect detection function

2)Measurement of sub angstrom surface roughness

3)Minimize thermal drift and automatically analyze measured data

4)Online monitoring and testing process,

application

Automatic defect detection

Related literature

Foucher; R Therese; Y. Lee; S.-I.