The nanotechnology detection service platform is a unique solution that transforms the Mibot nanotechnology robotic arm into a powerful nanotechnology probe for in-situ electrical characterization of integrated circuit processes and advanced materials in SEM. The nanotechnology robotic arm is carefully planned to minimize interference with the measured data signal, and the leakage current can be as low as 100 fa/v. Shielded cables connect each camera from the performance stage to a national standard RF connector. This service platform allows you to individually place up to 4 probes on indoor spaces in multiple mm workspaces, with pixels reaching nanotechnology* However, it is not insignificant that the compact design of the performance stage has made such solutions feasible for those who have a small vacuum chamber for these optical microscopes.



Visual in-situ low current electrical measurement. Touch the probe * * with the integrated circuit chip to measure the electrical characteristics of the integrated components and protect against defects. The Nanoprobing SEM solution from Imina Technologies is a turnkey project for analyzing the electrical characteristics of microelectronic devices and common faults in in-situ semiconductor materials.

*MiBot that can display a variety of equipment ™ Nanotechnology filtration devices are integrated into customer application regulations and machinery equipment. miBot ™ It is an outstanding piezoelectric actuator small intelligent robot that is easy to apply and has multiple functions. It allows you to accurately position the camera on mm level samples, with pixels as low as silicon oxide. The four playability features of this nanotechnology probe allow operators to easily adjust the probe's orientation during the experimental period.

The circular service platform can be installed on the SEM sample precise positioning platform and can also load locks based on SEM loading. The packaging shows a set of power adapters that can be used to update and modify almost all SEMs, even those with small chambers.

We are committed to designing solutions for low current measurement, and the electrical characteristics constructed by nanotechnology can be carried out based on shielded cables, third-party switch power meter modules (SMUs), and data signal detectors, with excellent signal-to-noise ratio.

The superior in-situ preamplifier and scanner ultrasonic generator are compatible with nanoprobes solutions, enabling quantitative analysis of EBIC and low-noise EBAC/RCI analysis.

Although the installation and disassembly of the performance stage installation version only takes more than ten minutes and does not require long-term modifications to the optical microscope chamber, the loading lock adaptation version presents a high shipping volume to replace the tested machine equipment and cameras, which is necessary to prevent the opening of the chamber.

Based on the intelligent robot service platform, various types of SEM stubs with suitable diameters allow you to observe the test samples as before.