The OTL-PECVD-1200-1200 dual temperature zone PECVD system consists of an OTL1200 vacuum tube furnace, quartz vacuum chamber, RF power supply, GX gas supply system, pumping system, and vacuum measurement system.

Main features:

1. Convert the gas inside the quartz vacuum chamber into an ionic state through an RF power supply.

2. PECVD requires lower temperatures for chemical vapor deposition compared to conventional CVD.

3. The stress level of the deposited film can be controlled by the frequency of the RF power supply.

4. PECVD has a higher chemical vapor deposition rate, better uniformity, consistency, and stability than ordinary CVD.

5. Widely used in the growth of various thin films, such as SiOx, SiNx, SiOxNy, and amorphous silicon (a-Si: H).

The OTL-PECVD-1200-1200 dual temperature zone PECVD system uses Swedish Kanthal resistance wire as the heating element, adopts a double-layer shell structure and a 30 segment program-controlled temperature control instrument, with phase-shifting triggering and thyristor control. The furnace is made of alumina polycrystalline fiber material, and the two ends of the furnace tube can be sealed with stainless steel flanges. Gas nozzles, valves, and pressure gauges are installed on the stainless steel flanges, and the vacuum degree can reach 10-3 Pa during vacuum pumping. It has the advantages of temperature field balance, low surface temperature, fast temperature rise and fall rate, energy saving, and favorable price.

(3) Good resistance balance and temperature field balance

(4) Heating element: Kanthal A1 imported resistance wire from Sweden (resistance wire can be guaranteed for 2 years)

When the circuit experiences overcurrent or leakage, the circuit will automatically disconnect

The furnace is equipped with communication interfaces and software, which can directly control various parameters of the furnace through a computer, and observe the PV and SV temperature values and instrument operation on the furnace from the computer. The actual heating curve of the furnace will be drawn in real time by the computer, and the temperature data at each moment can be saved, and the vacuum degree can be adjusted at any time.

(2) Adopting Japanese technology for molding.

(3) The spacing and pitch of the resistance wires in the furnace are all arranged according to the best thermal technology in Japan, and the temperature field is simulated through thermal software

(4) Using 4-week heating, the temperature field is more balanced

(All imported electrical appliances certified by UL)