High vacuum atomic force microscope for fault analysis and sensitive material research

Park NX Hivac improves measurement sensitivity and repeatability of atomic force microscopy measurements by providing high vacuum environments for failure analysis engineers. Compared with general environments or dry N2 conditions, high vacuum measurement has the advantages of high accuracy, good repeatability, and low damage to the needle tip and sample. Therefore, users can measure many signal responses in various fault analysis applications, such as dopant concentration in scanning diffusion resistance microscopy (SSRM).

Park NX Hivac enables materials science research with high precision and resolution measurements in vacuum environments, away from the influence of oxygen and other agents.

Performing scanning diffusion resistance microscopy measurements under high vacuum conditions can reduce the need for needle tips-The sample interaction force significantly reduces damage to the sample and needle tip. This can extend the service life of each needle tip, make scanning more cost-effective and convenient, and obtain more accurate results by improving spatial resolution and signal-to-noise ratio. Therefore, using NX Hivac for high vacuum scanning diffusion resistance microscopy measurement can be considered a wise choice for fault analysis engineers to increase their throughput, reduce costs, and improve accuracy.

Park Hivac Manager

NX Hivac vacuum automatic control

Hivac Manager finely controls vacuum conditions logically and visually with just one click, achieving high vacuum during pumping and exhausting processes. Each process is visually monitored through color and graphic changes, and with just one click, you don't have to worry about the vacuum operation sequence. Faster and simpler vacuum control software makes the use of atomic force microscopy more convenient and effective.

Park NX Hivac Technical Parameters

Scanner

Z scanner

Flexible guided high thrust scanner

Scanning range:15 µ m (optional 30 µ m)
High signal noise level:30 pm
0.5 kHz bandwidth, rms (typical)

XY scanner

Flexible guidance of closed-loop controlXY scanner

Scanning range: 100 µm × 100 µm
(Optional 50 µ m x 50 µ m)

Drive table

Z displacement table travel range: 24 mm (Motorized)
Focus on the travel range of the sample stage : 11 mm (Motorized)
XY displacement table travel range: 22 mm x 22 mm (Motorized)

Sample rack

sample size:The upper limit of size is 50mm x 50mm, with a thickness of up to 20mm
Sample weight :< 500="">

optics

10x long working distance lens
Visual coaxial imaging of sample surface and cantilever
view : 840 × 630 µ m (with 10x objective lens)
CCD: 5 M pixel

Physical Information

Internal vacuum chamber:300 mm x 420 mm x 320 mm
External vacuum (including granite & pump) :800 mm x 950 mm x 1240 mm

high vacuum

Vacuum level:Usually less than 1 x 10-5torr
Pump speed :Using turbines and dry pumps in approximatelyReaching 10 within 5 minutes-5torr

Software

SmartScan ™

AFM system control and data acquisition software
Quick setting and easy imaging of intelligent mode
The use of manual mode and more precise scanning control

XEI

AFM data analysis software

Vacuum Manager

Automatic vacuum control software

Electronics

Integrated functions
4-channel flexible digital lock-in amplifier
Spring constant calibration (thermal method, optional)
numberQ Control

External signal access
20 embedded signal input/output ports
5 TTL outputs:EOF、EOL、EOP、 Modulation and AC bias