As a precision measuring instrument for defect morphology analysis, its main purpose is to detect defects in samples. The data provided by the instrument cannot tolerate the existence of errors.Park NX20， This high-precision large-scale sample atomic force microscope is highly praised in the semiconductor and hard disk industries for its accuracy in data analysis.

Comprehensive and diverse analysis functions

Park NX20 can quickly help customers identify the cause of product failure and assist them in developing more creative solutions. High precision can bring users high-resolution data, allowing them to focus more on their work. At the same time, the non-contact scanning mode makes the probe tip sharper and more durable, without the need to spend a lot of time and money on frequent probe replacement.

byFA and research laboratories provide precise morphology measurement solutions

· Surface roughness measurement of samples and substrates

· Defect inspection imaging and analysis

· High resolution electronic scanning mode

· Decoupling of industry-leading 3D structure measurementXY scanning system

· low noiseThe Z detector can accurately measure the surface morphology of atomic force microscopy

Park NX20 features

llow noiseXYZ position sensor

lAutomatic multi-point sample scanning

lEmbedded design of sliding scanning head

lEasy to plug and unplug expansion slot for advanced scanning mode

lhigh speed24 digit electronic controller

lhigh speedZ-axis scanner with a scanning range of up to 15 µ m

lIntegrated EncoderXY automatic sample stage

lEasy to operate sample stage

lCoaxial high-power optical integrationLED lighting and CCD system.

lautomaticZ-axis movement and focusing system

Park NX20 Technical Parameters

Scanner

Z scanner

Flexible guided high thrust scanner

Scanning range:15 µ m (optional 30 µ m)
High signal noise level:30 pm
(RMS, at 0.5 kHz bandwidth)

XY scanner

Flexible guidance of closed-loop controlXY scanner

Scanning range:100 µm × 100 µm
(Optional 50 µ m x 50 µ m)

Drive table

Z displacement table travel range: 25 mm (Motorized)
Focus on the travel range of the sample stage : 15 mm (Motorized)
XY displacement table travel range: 200 mm x 200 mm

Sample rack

Sample size :Basic Configuration Open Space up to 200 mm x 200 mm, Thickness up to 20 mm
Sample weight :< 500="">

optics

10x (0.23 N.A.) ultra long working distance lens (1 µ m resolution)
Visual coaxial imaging of sample surface and cantilever
view : 840 × 630 µ m (with 10x objective lens)
CCD1 million pixels, 5 million pixels (optional)

Software

SmartScan ™

Specialized software for AFM system control and data acquisition
Quick setting and easy imaging of intelligent mode
Advanced use of manual mode and more precise scanning control

XEI

AFM data analysis software

Electronics

Integrated functions
4-channel digital lock-in amplifier
dataQ Control

signal processing

ADC :18 channels 4 high-speed ADC channels 24-bit ADCs for X, Y and Z scanner position sensor

DAC :17 channels 2 high-speed DAC channels 20-bit DACs for X, Y and Z scanner positioning

Maximum data size :4096 x 4096 pixels

Connect external signals
20 embedded input/output ports
5 TTL outputs:EOF, EOL, EOP, Modulation and AC bias voltage