-Instrument Introduction
SGC-10 thin film thickness gauge is suitable for measuring the thickness of thin films and coatings such as media, semiconductors, thin film filters, and liquid crystals. This thin film thickness gauge was developed in collaboration between our company and New Span in the United States. It utilizes New Span's advanced thin film thickness measurement technology and is based on the principle of white light interference to measure the thickness and optical constants (refractive index n, extinction coefficient k) of thin films. By analyzing the reflection spectra formed by the coherent reflection light on the surface of the thin film and the reflection light at the interface between the thin film and the substrate, software is used to fit and calculate the thickness d, refractive index n, and extinction coefficient k of each layer in a single-layer or multi-layer film system. The key components of this equipment are all imported from abroad, and the entire machine can also be imported according to customer needs.
-Powerful software features
The interface is user-friendly and easy to operate, and users can complete measurements with just a few clicks of the mouse. Convenient and fast storage and reading of measured reflectance spectrum data with powerful processing capabilities, capable of simultaneously measuring reflectance data of up to four layers of thin films. One measurement can obtain the thickness and optical constants of four layers of thin films. The material library contains a large amount of optical constant data for conventional materials. Users can easily expand their material database on their own.
-Product functional applicability
This instrument is suitable for measuring the thickness of various media, semiconductors, thin film filters, liquid crystals, and other thin films and coatings.
-A typical thin film material is
SiO2、CaF2、MgF、 Photoresist, polycrystalline silicon, amorphous silicon SiNx、TiO2、 Polyimide and polymer film.
-A typical base material is
SiGe、GaAs、ZnS、ZnSe、 Aluminum acrylic, sapphire, glass, polycarbonate, polymer, quartz.
The instrument has an open design, and the fiber optic probe of the instrument can be easily removed. It can be connected to a microscope with a C-mount suitable for micro area (>10 μ m, depending on the magnification of the microscope) thin film thickness (the microscope needs to be equipped separately) through the fiber optic adapter (as shown in the figure) attached to the instrument, allowing the measuring instrument to measure.
-Basic configuration and parameters