Product Features

Product features of the self-supporting 4-inch rapid annealing furnace (RTP-3-04 series):

• Measurable large-sized samples:The size of the measurable single crystal sample is 4 inches.

• Remote operation available:Provide remote monitoring module.

• Innovative design of pressure control system:High precision pressure control to meet different process requirements.

• Storage heat treatment process:Convenient access to process parameters, improved experimental efficiency, and searchable data.

• Rapid temperature control and high vacuum:The maximum heating rate can reach 150 ℃/s, and the maximum vacuum degree can reach 10^-3Pa。

• Program settings and gas path expansion:It can achieve precise control of different temperature ranges, automatically switch between cooling ranges, and save the process menu for easy access. Using MFC to precisely control gas flow and achieve heat treatment in different atmospheric environments (vacuum, nitrogen, etc.).

• Unique cavity space design:Ensure that the temperature field uniformity of large-sized samples is ≤ 1%.

• Fully automatic intelligent control:Adopting fully automatic intelligent control, including temperature, time, gas flow rate, vacuum, cooling water, etc., all of which can be automatically controlled.

• Ultra high safety factor:Adopting triple safety measures including furnace door safety temperature opening protection, temperature controller opening permission protection, and equipment emergency stop safety protection, we comprehensively ensure the safety of equipment use.

• Domestic annealing furnace:Having independent research and development technology and manufacturing capabilities, able to quickly respond to customer after-sales needs.