The MPI high-power device characterization system is designed specifically for testing high-power devices on wafers. The MPI TS150-HP probe system provides a complete 150mm wafer solution. They are designed to achieve low contact resistance measurement of power semiconductors over a wide temperature range.

2、 Product Description

1. Single machine multi application design

Suitable for various wafer measurement applications, such as component characterization and modeling, wafer level reliability (WLR), failure analysis (FA), integrated circuit engineering, and microelectromechanical systems (MEMS)

2. Ergonomics and Safety Design

• Design of a quick release and drag air floating platform for convenient one handed operation
• Durable workbench capable of carrying up to 10 high-voltage HV or 4 high current HC micro locators
• Electromagnetic shielding box and workbench arc shielding ArcShield design provide safety protection for high-voltage measurement
• Three stage workbench quick lift handle design (contact separation loading), achieving high reproducibility

There are also various instrument connection options and wafer stages that can be upgraded, as well as many accessories such as DC/RF/mmW micro locators, optical microscopes, imaging lenses, electromagnetic shielding boxes, etc. that can be installed to fully support application needs.

3、 Characteristics and advantages

1. Air Stage

The MPI air bearing platform is designed with a simple one handed disc control, providing unparalleled operational convenience, enabling fast XY navigation and fast wafer loading without affecting precise and accurate positioning capabilities, and featuring an additional fine and precise 25x25mm XY Theta micrometer movement.

2. 10kV coaxial or 3kV triaxial ambient chucks

The chuck options include MP's 10kV coaxial or 3kV three-axis annular chuck or various ERS thermal chuck, which can support temperature measurement up to 300 ℃. The thermal touch controller is designed to be installed on the probe for quick and convenient operation.

3. HV/HC probes

The MPI high-power detection solution includes dedicated high voltage and high current probes that use MPI's proprietary multi contact tips to reduce contact resistance. MPI's high-voltage probe is capable of low leakage current measurement during high-voltage testing, testing up to 3kV three-axis or 5 and 10kV coaxial settings.

4. Safe and Accurate

The standard manual high-power probe system is equipped with DarkOX, which provides interlocking safety and EM shielding functions to ensure low noise, accurate, and safe measurements.

5. Instruments Integration

TS150-HP/TS200-HP can be configured with various instrument connection packages, including necessary high voltage/high current probes and wiring accessories, to achieve optimal connection with Keysight B1505 (3kV or 10kV) or Keithley and other testing instruments 2600-PCT-XB, including integration of 8020 high-power interface panel.

4、 Functional parameters

Specifications

Probe pressure plate

Non thermal high-power chuck