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White light interferometer
The white light interferometer adopts a white light interferometry measurement sensor, with a vertical resolution of up to 0.1nm. Detailed technical p
Product details
White light interferometer
Detailed technical parameters:
Measurement principle: White light interferometry measurement
Measuring objective lens 10X 20X 50X
Vertical measurement range: 100um (400um optional)
Vertical resolution of 0.1nm
X. Y measurement range: 1.6X1.2mm 0.8X0.6mm 0.32X0.24mm
Working distance: 3.6mm 3.6mm 1.7mm
Lateral resolution 2.5um 1.25um 0.5um
White light interferometer
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