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proximity aligner
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Nano observer electrical atomic force microscope
Maskless laser direct writing
Semi automatic wafer bonding machine
proximity aligner
Array pressure sensing system
Atomic layer deposition system ALD products
Electron microscope sample cleaning machine
CMP20 electrochemical mechanical polishing machine
Laser interference lithography machine
VITA reactive ion etching machine (vertical chamber)
COWIN High Throughput Integrated Plasma Reaction Ion Etching Cleaning System
LAVIDA Paraxylene Coating Equipment
Co series desktop plasma etching machine cleaning machine
CLONE dual-mode plasma etching machine cleaning machine
Liquid particle size analyzer
EzAFM portable atomic force microscope
Laser sampling
Precision glass cutting machine (desktop type)
ADR low-temperature constant temperature dry mK system
Liquid Particle Sizer - LPC
High temperature 3D printer
Block resistance tester
S100 type digital source table
NX12 Biological Atomic Force Microscope
Zeta-388 automatic multi-mode optical profilometer
TS200-HP high-power probe station
Zeta-300 multi-mode optical profilometer
TS2000-DP high-power probe station
TS50 manual small probe station
TS2500-RF Fully Automatic RF Probe Station
TS3000 automatic probe station
MicroXAM800 White Light Interferometer
TS300 12 inch manual probe station
MDO34 oscilloscope
In situ AFM in SEM
Pulse laser deposition system (PLD)
Active Vibration Isolation Platform AMT
Duramin-100 hardness tester
3-inch nanoimprint machine NIL75
In situ automatic nanomanipulation system
In situ MEMS chips and synchrotron radiation holders
In SEM HT high-temperature in-situ nanoindentation instrument
Duramin-4 hardness tester
High temperature in-situ nanoindentation instrument
Active isolation table ARISTT
Active isolation table ARISMD
Passive vibration isolation SOTOT
Passive isolation table GWA-M
Passive isolation table GWA-TO
Active isolation table PMT
Diener Pico plasma cleaning machine
Diener FEMTO plasma cleaning machine
FT-NMT04 Nano Mechanical Performance Testing System
ACCUTOM-10/-100 cutting equipment
X1 series digital adjustable drying cabinet
EZ series stereomicroscope
DM 4500P semi-automatic intelligent digital polarizing microscope
Leica M Series Stereoscopic Microscope LeicaM165FC/205FA
S series stereomicroscope
Leica M Series Stereoscopic Microscope LeicaM125/165C/205C/205A
DM750P professional polarizing microscope
EUV/X-ray reflector
X-ray Fresnel zone plate (FZP)
Grating template
MPI Titan RF Accessories
GGB microwave probe
Quantifoil porous mesh carrier
GGB calibration standard sample
Customized vibration isolation system
Ion beam etching/deposition system
Silicon nitride thin film window
AFM substrate
AFM probe
MPI RF calibration substrate
GGB active high impedance needle tip
GGB DC probe
Hole shaped template
Prism coupler
Duramin-40 hardness tester
4-inch nanoimprint machine NIL-100
Leica room temperature ultra-thin slicer Leica EM UC7
Film thickness measuring instrument
BI-2500 desktop surface plasmon resonance analyzer
Established Active Vibration Isolation Platform
BI-4500 high-throughput fully automatic surface plasmon resonance analyzer
TS150-HP high-power probe station
Scanwave Scanning Microwave Near Field Impedance Microscope
MVI scattering scanning near-field optical microscope
TS150 6-inch manual probe station
4200A-SCS parameter analyzer
F40 Microscopic Film Thickness Measuring Instrument
Zeta20 multi-mode 3D optical profilometer
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Room 707, Aiqian Building, 599 Lingling Road, Xuhui District, Shanghai, China
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